Optimization of NLDMOS Structure for Higher breakdown voltage and lower on-resistance

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題名:	Optimization of NLDMOS Structure for Higher breakdown voltage and lower on-resistance
作者:	hema;hema;許健;Sheu, Gene;aryadeep;aryadeep;erry;erry;楊紹明;Yang, Shao-Ming;chen, PA;chen, PA
貢獻者:	資訊工程學系
日期:	2014-05
上傳時間:	2014-06-05 04:03:45 (UTC+0)
摘要:	In this work, high voltage NLDMOS performance in terms of high blocking voltage and On-Resistance have been investigated. In order to obtain the optimum electrical performance several key factors have been optimized such as linearity of HVNW profile, drift length and source field plate. Linear HVNW profile is obtained by linearity of HVNW mask. NLDMOS having blocking voltage of 100 V-300 V and lower On-resistance is developed based on 0.35um BCD Technology with less manufacturing cost. It is investigated that NLDMOS has poor performance over blocking voltage of 300V.
關聯:	2014 IEEE 8th International Power Engineering and Optimization Conference ;PEOCO2014), Langkawi, The Jewel of Kedah,
顯示於類別:	[國際企業學系] 期刊論文

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