Characterization of AlN Films on Y-128� LiNbO3 by Surface Acoustic Wave Measurement

ASIAIR > College of Computer Science > Department of Computer Science and Information Engineering > Journal Artical > Item 310904400/8913

Please use this identifier to cite or link to this item: http://asiair.asia.edu.tw/ir/handle/310904400/8913

Title:	Characterization of AlN Films on Y-128� LiNbO3 by Surface Acoustic Wave Measurement
Authors:	Sean wu;Yeong-Chin Chen;Yee Shin Chang
Date:	2002
Issue Date:	2010-04-15 05:41:52 (UTC+0)
Abstract:	Y-128� LiNbO3 is used extensively for the development of surface acoustic wave (SAW) devices. AlN thin films are an attractive material that have some excellent characteristics, such as high surface acoustic wave (SAW) velocity, piezoelectricity, high-temperature stability, and stable chemical properties. In this research, AlN films were sputtered on Y-128� LiNbO3 to yield a new piezoelectric substrate for SAW devices. The X-ray diffraction (XRD) method and SAW measurement were used to evaluate the material and acoustic properties of this structure. The experimental results exhibited that highly c-axis-oriented AlN films were prepared on Y-128� LiNbO3. AlN films on Y-128� LiNbO3 can effectively enhance the SAW velocity and improve the poor temperature stability, but reduce the electromechanical coupling coefficient (k2) values. As the ratio (film-thickness/acoustic-wavelength) increased, the SAW velocities and the temperature coefficient of frequency (TCF) all increased, but the electromechanical coupling coefficient (k2) values decreased.
Relation:	Japanese Journal of Applied Phyics 41(1)7 : 4605-4608
Appears in Collections:	[資訊工程學系] 期刊論文

Files in This Item:

File	Description	Size	Format
		0Kb	Unknown	301	View/Open
310904400-8913.doc		39Kb	Microsoft Word	123	View/Open