微流體系統包含微幫浦、微流道、微閥和流體感測器，其中微閥是微流系統的關鍵元件，用來控制流體的流動方向及流量，輔助微流體操作。雙金屬熱動式微閥設計，利用薄膜膨脹係數的不同，藉由加熱使薄膜彎曲，控制腔體流量。微製造技術製作微流體元件，能精密控制微量流體，還具製程簡單，致動範圍大，元件體積小，消耗功率小，和積體化整合等特點。本文發展智慧型電路驅動控制微閥，能夠量測流量以及溫度反應，加上控制法則，使得控制電路能夠精確靈敏的控制微元件，構成多功能智慧化之微流體系統模組。
The micro flow system contains micropump, micro channel, microvalve, and fluidic sensor. The micro valve is an important device of the micro fluidic system. It can be used to regulate flow direction and flow rate. It can also control process of the chemical or bio reaction. For an active micro valve, it is often driven by heating bimetal base on the material’s different thermal expansion coefficients. The micro flow devices fabricated by micro fabrication technique can control flow rate accurately with low power consumption. Furthermore, it has larger actuation range, smaller dimension, fast response and easy integration with other sensing components. In this paper, a smart circuit to control and drive micro valves is proposed. The circuit can measure both of flow rate and reaction temperature. The circuit also can drive devices precisely with high sensitivity after adding suitable control rules. After the microfabrication and circuit design, a multi-functional smart micro flow system will be fully studied.
