Alternative Methods Under Hydrogen Dilution to Fabricate Nanocrystalline Silicon Films by Plasma-Enhanced Chemical Vapor Deposition

ASIA unversity > 資訊學院 > 光電與通訊學系 > 會議論文 > Item 310904400/15025

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Title:	Alternative Methods Under Hydrogen Dilution to Fabricate Nanocrystalline Silicon Films by Plasma-Enhanced Chemical Vapor Deposition
Authors:	葉榮輝;Yeh, Rong-Hwei
Contributors:	光電與通訊學系
Date:	2009-12
Issue Date:	2012-11-23 03:14:46 (UTC+0)
Relation:	OPT 2009 台灣光電科技研討會暨國科會光電學門研究成果發表會
Appears in Collections:	[光電與通訊學系] 會議論文

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