In this study, the use of RF magnetron sputtering system suc-cessfully splashed copper zinc tin sulfur selenium CZT (S, Se) flexible solar cell, the choice of the substrate is stainless steel. Due to the loss of selenium and sulfur need to be patched through tin sulfide (SnS) lam-inated manner and investigate the effect of annealing temperature on the film. Measured by α-step profilometer surface coating rate, by X-ray diffraction analyzer (XRD) analysis of copper and zinc tin sulfur selenide thin-film crystalline phase; ultraviolet / visible spectropho-tometer (UV-Vis) to calculate the optical energy gap; a field effect emission type scanning electron microscope (FE-SEM) to observe the surface morphology; the EDS composition analysis of the atomic percentage relative percentage; reuse Raman (RAMAN) spectroscopy measurement accuracy crystallization was observed; finally through the atomic force microscope AFM to in contrast to sputtering film and the glass substrate difference flexible substrate of stainless steel. By the XRD analysis results can be obtained, the higher the crystallization annealing temperature, the stronger the strength. Another advantage of sputtering tin sulfide (SnS) target to repair CZT (S, Se) in different positions and the thickness of 30 nm on the uppermost layer stack exhibited good film composition analysis, and then depositing a layer of ZnS in SnS film in ZnS and SnS laminated with CZT (S, Se) and then change the intermediate annealing time 10, 20 ,30 minutes, and then more in-depth discussion.
