CuCrO2 is a transparent conductive oxide film, which has the potential for the applications of photovoltaic components. In this study, CuCr1-xCaxO2 (x = 0,0.015,0.035,0.055 and 0.075) films were prepared by sol-gel method. Doping of calcium (Ca) contents did not exceed the solid solution of CuCrO2 material, and no secondary phase existed. The light transmittance of CuCrO2 thin films can effectively improve by doping calcium elements. The doping of Ca affects the absorption coefficient of CuCrO2 thin film for long wavelength (visible light) and short wavelength (ultraviolet light). The resistivities of Ca-doped CuCrO2 films are lower than that of undoped CuCrO2 film. The resistivities decrease from 33.61 Ωcm to 5.35 Ωcm, and the carrier concentrations can be increased from 3.53 × 1014 cm-3 to 4.52 × 1018 cm-3. Finally, these analyzes confirm that Ca + 2 substitutes Cr + 3 can effectively enhance the hole carrier concentration, and can reduce the CuCr1-xCaxO2 film resistivity.
