In this study, the energy consumptions of air-conditioning temperature and humidity, Fan Filter Unit (FFU), lighting, and boiler systems of a semiconductor factory clean room were analyzed, and the possible and feasible way of energy savings, the mode of calculation of the energy consumption of various energy-saving mode were evaluated, in order to find effective and feasible way of energy savings. An online energy saving assessment system using Microsoft ASP.NET and Microsoft .NET Framework 3.5 was then developed to be used for clean room air conditioning, lighting, hot water boiler system simulation before and after provision of energy data. The factory maintenance user needs not download or install any software but just log in through the Internet to this online energy assessment system to calculate the most energy-saving and low-cost operation mode, significantly minimize possible errors and mistakes on their own by hand calculation or look-up table diagram.
